Optical properties of amorphous silicon thin films deposited by plasma chemical jet method.

Autor: Strunin, V.I., Baranova, L.V., Lyahov, A.A., Popov, V.V., Hudaybergenov, G.J., Jacob, S.S.
Zdroj: 2009 International Conference & Seminar on Micro/Nanotechnologies & Electron Devices; 2009, p59-61, 3p
Databáze: Complementary Index