3-D process modeling - A novel and efficient tool for MEMS foundry design support.
| Autor: | Holzer, G., Knechtel, R., Breit, S., Schropfer, G. |
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| Zdroj: | 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 2009, p200-205, 6p |
| Databáze: | Complementary Index |
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