Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling.
| Autor: | Veeger, C.P.L., Etman, L.F.P., van Herk, J., Rooda, J.E. |
|---|---|
| Zdroj: | 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 2009, p80-85, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|