Aluminum Nitride Contour-Mode Vibrating RF MEMS.
| Autor: | Piazza, G., Stephanou, P.J., Pisano, A.P. |
|---|---|
| Zdroj: | 2006 IEEE MTT-S International Microwave Symposium Digest (9780780375420); 2006, p664-667, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Piazza, G., Stephanou, P.J., Pisano, A.P. |
|---|---|
| Zdroj: | 2006 IEEE MTT-S International Microwave Symposium Digest (9780780375420); 2006, p664-667, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|