Silicon carbide coated MEMS strain sensor for harsh environment applications.
| Autor: | Azevedo, R.G., Jingchun Zhang, Jones, D.G., Myers, D.R., Jog, A.V., Jamshidi, B., Wijesundara, M.B.J., Maboudian, R., Pisano, A.P. |
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| Zdroj: | 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS); 2007, p643-646, 4p |
| Databáze: | Complementary Index |
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