Accurate determination of ultra-shallow junction sheet resistance with a non-penetrating four point probe.
| Autor: | Hillard, R.J., Borland, J., Win Ye, C. |
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| Zdroj: | Fourth International Workshop on Junction Technology, 2004 (IWJT '04); 2004, p98-101, 4p |
| Databáze: | Complementary Index |
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