HDP-CVD STI gap-fill using the parallel resonance antenna.
| Autor: | Jeong Beom Lee, Jeong Hoon Han, Chul Sik Kim, Dae Bong Kang, Gi-Chung Kwon, Young Lee |
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| Zdroj: | 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts; 2003, p421-421, 1p |
| Databáze: | Complementary Index |
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