Development of in-situ plasma density monitoring method in inductively coupled plasma.
| Autor: | Jung-Hyun Cho, Min-Joong Jung, Gon-Ho Kim |
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| Zdroj: | 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts; 2003, p191-191, 1p |
| Databáze: | Complementary Index |
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