Single-Wafer vs. Batch Wet Surface Preparation in BEOL: a Comparison of Polymer Cleans using Inorganic Chemicals in Flash Memory Production.
| Autor: | Couteau, T., Dawson, G., Halladay, J., Archer, L. |
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| Zdroj: | 17th Annual SEMI/IEEE ASMC 2006 Conference; 2006, p292-295, 4p |
| Databáze: | Complementary Index |
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