Evaporation vs. Sputtering of metal layers on the Backside of Silicon wafers.
| Autor: | Ciacchi, M., Eder, H., Hirscher, H. |
|---|---|
| Zdroj: | 17th Annual SEMI/IEEE ASMC 2006 Conference; 2006, p99-103, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Ciacchi, M., Eder, H., Hirscher, H. |
|---|---|
| Zdroj: | 17th Annual SEMI/IEEE ASMC 2006 Conference; 2006, p99-103, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|