Experimental Evaluation of Second Harmonic Generation for Non-Invasive Contamination Detection in SOI Wafers.
| Autor: | Alles, M.L., Pasternak, R., Tolk, N.H., Schrimpf, R.D., Fleetwood, D.M., Standley, R.W. |
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| Zdroj: | 17th Annual SEMI/IEEE ASMC 2006 Conference; 2006, p1-6, 6p |
| Databáze: | Complementary Index |
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