Performance of ultrasonic electrostatic resonators for use in micro propulsion.
| Autor: | Parviz, B.A., Allen Chou, T.-K., Zhang, C., Najafi, K., Muller, M.O., Washabaugh, P.D., Bernal, L.P. |
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| Zdroj: | Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p586-589, 4p |
| Databáze: | Complementary Index |
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