Optimisation of a two-wire thermal sensor for flow and sound measurements.
Autor: | van Honschoten, J.W., Krijnen, G.J.M., Svetovoy, V.B., de Bree, H.-E., Elwenspoek, M.C. |
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Zdroj: | Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p523-526, 4p |
Databáze: | Complementary Index |
Externí odkaz: |