Decoupled microgyros and the design principle DAVED.
| Autor: | Geiger, W., Butt, W.U., Gaisser, A., Frech, J., Braxmaier, M., Link, T., Kohne, A., Nommensen, P., Sandmaier, H., Lang, W. |
|---|---|
| Zdroj: | Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p170-173, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|