An ultra-sensitive, high-vacuum absolute capacitive pressure sensor.
| Autor: | Yafan Zhang, Massoud-Ansari, S., Guangqing Meng, Woojin Kim, Najafi, N. |
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| Zdroj: | Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p166-169, 4p |
| Databáze: | Complementary Index |
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