Implementation of a Si-rich SiON nucleation layer for an improved selective SiGe HBT architecture.
| Autor: | Van Huylenbroeck, S., Loo, R., Decoutere, S., Vleugels, F., Kunnen, E., Schaekers, M., Caymax, M. |
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| Zdroj: | Proceedings of the Bipolar/BiCMOS Circuits & Technology Meeting; 2002, p143-146, 4p |
| Databáze: | Complementary Index |
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