In situ characterization of CMOS post-process micromachining.
| Autor: | Warneke, B., Pister, K.S.J. |
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| Zdroj: | Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308); 2000, p614-618, 5p |
| Databáze: | Complementary Index |
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