Metal film protection of CMOS wafers against KOH.
| Autor: | Munch, U., Brand, O., Paul, O., Baltes, H., Bossel, M. |
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| Zdroj: | Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308); 2000, p608-613, 6p |
| Databáze: | Complementary Index |
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