Embedded-mask-methods for mm-scale multi-layer vertical/slanted Si structures.
| Autor: | Mita, Y., Mita, M., Tixier, A., Gouy, J.-P., Fujita, H. |
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| Zdroj: | Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308); 2000, p300-305, 6p |
| Databáze: | Complementary Index |
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