Reliable and damage-free dry grating etching for the InGaAsP DFB laser diodes.
| Autor: | Hyeon Soo Kim, Eun-Hwa Lee, Do Young Rhee, Young Churl Bang, Joon Sang Yu, Jung Kee Lee, Ahn Goo Choo, Tae Il Kim |
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| Zdroj: | International Conference on Indium Phosphide & Related Materials, 2003; 2003, p480-483, 4p |
| Databáze: | Complementary Index |
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