Optimized DRIE etching of ultra-small quartz resonators.
| Autor: | Chang, D.T., Stratton, F.P., Kubena, R.L., Joyce, R.J. |
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| Zdroj: | Proceedings of the 2003 IEEE International Frequency Control Symposium & PDA Exhibition Jointly with the 17th European Frequency & Time Forum, 2003; 2003, p829-832, 4p |
| Databáze: | Complementary Index |
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