Analysis and improvement of dynamic characteristic of 3-axis nano stage.
| Autor: | Choong Kim, Kang-Nyung Lee, Dong-Ju Lee, No-Cheol Park, Young-Pil Park, Jung-Woo Park, Dong-Jin Lee, Moon Gu Lee, Hyoung Gil Choi, Suk-Won Lee |
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| Zdroj: | IEEE International Conference on Mechatronics, 2005. ICM '05; 2005, p34-38, 5p |
| Databáze: | Complementary Index |
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