Non-contact optical three dimensional liner metrology.
| Autor: | Sebring, R.J., Edwards, J.M., Salazar, M.A. |
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| Zdroj: | IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science & 13th IEEE International Pulsed Power Conference (Cat. No.01CH37); 2001, p414-414, 1p |
| Databáze: | Complementary Index |
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