High-voltage microsecond pulse generator for plasma immersion ion implantation.
| Autor: | Vizir, V.A., Zorin, V.B., Ivanov, S.V., Kovalchuk, B.M., Maksimenko, A.D., Manilov, V.I., Smorudov, G.V., Shubkin, N.G., Chervyakov, V.V. |
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| Zdroj: | IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science & 13th IEEE International Pulsed Power Conference (Cat. No.01CH37); 2001, p179-179, 1p |
| Databáze: | Complementary Index |
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