Test chips for evaluating strong phase shift lithography.
| Autor: | Ashton, R.A., Kane, B.C., Blatchford, J.W., Shuttleworth, D.M. |
|---|---|
| Zdroj: | ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153); 2001, p153-158, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|