Self aligned passivation of Cu in Cu/Cr, Cu/V and Cu/Ta multilayers.
| Autor: | Iraji-zad, A., Vashaei, Z., Mahdavi, S.M. |
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| Zdroj: | ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453); 2000, p209-212, 4p |
| Databáze: | Complementary Index |
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