Investigation of wafer temperature effect during implant for PMOS transistor fabrication.
| Autor: | Tae-Hoon Huh, Byung-Jae Kang, Geum-Joo Ra, Shin-Woo Kang, Kim, S., Reece, R., Rubin, L.M., Min-Sung Lee, Jong-Oh Lee, Dong-Chul Park |
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| Zdroj: | Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08); 2008, p39-42, 4p |
| Databáze: | Complementary Index |
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