Effects of wafer emissivity on lightpipe radiometry in RTP tools.
| Autor: | Kreider, K.G., Allen, D.W., Chen, D.H., DeWitt, D.P., Meyer, C.W., Tsai, B.K. |
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| Zdroj: | 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001; 2001, p163-168, 6p |
| Databáze: | Complementary Index |
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