Pockets and offset spacer engineering for 100 nm CMOS.
| Autor: | Surdeanu, R., Dachs, C.J.J., Stolk, P.A., Cubaynes, F.N., Ponomarev, Y.V. |
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| Zdroj: | 31st European Solid-State Device Research Conference; 2001, p431-434, 4p |
| Databáze: | Complementary Index |
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