Dose Loss and Defect Mechanisms in Antimony Buried Layers for a 0.35um BiCMOS Process.

Autor: Deignan, A., McAuliffe, D., Doyle, D., Moloney, K., Roche, M., O'Neill, M.
Zdroj: 30th European Solid-State Device Research Conference; 2000, p272-275, 4p
Databáze: Complementary Index