Towards Piezoresistive CMOS Sensors for Out-of-Plane Stress.
| Autor: | Lemke, B., Kratt, K., Baskaran, R., Paul, O. |
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| Zdroj: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems; 2009, p781-784, 4p |
| Databáze: | Complementary Index |
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