Integration of a temporary carrier in a TSV process flow.
| Autor: | Charbonnier, J., Cheramy, S., Henry, D., Astier, A., Brun, J., Sillon, N., Jouve, A., Fowler, S., Privett, M., Puligadda, R., Burggraf, J., Pargfrieder, S. |
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| Zdroj: | 2009 59th Electronic Components & Technology Conference; 2009, p865-871, 7p |
| Databáze: | Complementary Index |
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