Design and fabrication of condenser microphone using wafer transfer and micro-electroplating technique.
| Autor: | Zhen-Zhun Shu, Ming-Li Ke, Guan-Wei Chen, Ray-Hua Horng, Chao-Chih Chang, Jean-Yih Tsai, Chung-Ching Lai, Ji-Liang Chen |
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| Zdroj: | 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS; 2008, p386-390, 5p |
| Databáze: | Complementary Index |
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