Manufacturing of a micro probe using supersonic aided electrolysis process.
| Autor: | Shyu, R.F., Feng-Tsai Weng, Chi-Ting Ho |
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| Zdroj: | 2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS; 2008, p326-329, 4p |
| Databáze: | Complementary Index |
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