Effect of thin polyimide film on performance of AlN/SiO2/Si SAW device.

Autor:	Trang Hoang, Rey, P., Vaudaine, M.-H., Benech, P.
Zdroj:	2008 Ph.D. Research in Microelectronics & Electronics; 2008, p21-24, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu