Extension of antenna rules for reducing P2ID in 0.13 Cu dual damascene technology.
| Autor: | Qian-Wei Ding, Kay-Ming Lee, Chi-Liang Lin, Hsu, M.C.C. |
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| Zdroj: | 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 2008, p393-396, 4p |
| Databáze: | Complementary Index |
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