Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique.
| Autor: | Ferri, M., Mancarella, F., Roncaglia, A., Ransley, J., Jize Yan, Seshia, A. |
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| Zdroj: | 2008 IEEE Sensors; 2008, p1131-1134, 4p |
| Databáze: | Complementary Index |
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