From MEMS to NEMS: Closed-loop actuation of resonant beams beyond the critical Duffing amplitude.
Autor: | Juillard, J., Bonnoit, A., Avignon, E., Hentz, S., Kacem, N., Colinet, E. |
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Zdroj: | 2008 IEEE Sensors; 2008, p510-513, 4p |
Databáze: | Complementary Index |
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