From MEMS to NEMS: Closed-loop actuation of resonant beams beyond the critical Duffing amplitude.

Autor: Juillard, J., Bonnoit, A., Avignon, E., Hentz, S., Kacem, N., Colinet, E.
Zdroj: 2008 IEEE Sensors; 2008, p510-513, 4p
Databáze: Complementary Index