Electron energy loss spectrum application for failure mechanism investigation in semiconductor failure analysis.
| Autor: | Kun Lin, Chia Hung Chao, Tsui-Hua Huang, Hsiu-Mei Fan, Shey-Shi Lu |
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| Zdroj: | 2008 IEEE International Reliability Physics Symposium; 2008, p589-592, 4p |
| Databáze: | Complementary Index |
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