Short-flow test chip utilizing fast testing for defect density monitoring in 45nm.
| Autor: | Karthikeyan, M., Cote, W., Medina, L., Shiling, E., Gasasira, A., Henning, A., Ferrante, W., Craig, M., Merbeth, T. |
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| Zdroj: | 2008 IEEE International Conference on Microelectronic Test Structures; 2008, p56-61, 6p |
| Databáze: | Complementary Index |
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