Development of novel SU-8 based nanoimprint lithography.
Autor: | Shen-Qi Xie, Bing-Rui Lu, Jing Wan, Rong Yang, Yifang Chen, Xin-Ping Qu, Ran Liu |
---|---|
Zdroj: | 2008 9th International Conference on Solid-State & Integrated-Circuit Technology; 2008, p2476-2479, 4p |
Databáze: | Complementary Index |
Externí odkaz: |