Development of novel SU-8 based nanoimprint lithography.
| Autor: | Shen-Qi Xie, Bing-Rui Lu, Jing Wan, Rong Yang, Yifang Chen, Xin-Ping Qu, Ran Liu |
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| Zdroj: | 2008 9th International Conference on Solid-State & Integrated-Circuit Technology; 2008, p2476-2479, 4p |
| Databáze: | Complementary Index |
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