Atomic level solutions® for advanced microelectronic applications.
| Autor: | Senzaki, Y., Seidel, T., McCormick, J., Kim, G.Y., Kim, H.Y., Karim, Z., Lu, B., Ramanathan, S., Lindner, J., Silva, H., Daulesberg, M. |
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| Zdroj: | 2008 9th International Conference on Solid-State & Integrated-Circuit Technology; 2008, p1308-1311, 4p |
| Databáze: | Complementary Index |
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