Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing.

Autor: Darscht, Maxim Ya., Miklyaev, Yuri V., Mikhailov, Alexei V., Lissotschenko, Vitalij N.
Zdroj: 2007 Quantum Electronics & Laser Science Conference; 2007, p1-1, 1p
Databáze: Complementary Index