Correlation between Chemical and Electrical Properties of SiNx Deposed by PECVD. Impact on RF MEMS devices.
Autor: | Lamhamdi, M., Pons, P., Boudou, L., Guastavino, J., Segui, Y., Plana, R. |
---|---|
Zdroj: | 2007 IEEE International Conference on Solid Dielectrics; 2007, p643-646, 4p |
Databáze: | Complementary Index |
Externí odkaz: |