Correlation between Chemical and Electrical Properties of SiNx Deposed by PECVD. Impact on RF MEMS devices.
| Autor: | Lamhamdi, M., Pons, P., Boudou, L., Guastavino, J., Segui, Y., Plana, R. |
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| Zdroj: | 2007 IEEE International Conference on Solid Dielectrics; 2007, p643-646, 4p |
| Databáze: | Complementary Index |
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