Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beams.
| Autor: | Ayanoor-vitikkate, V., Kuan-lin Chen, Woo-Tae Park, Yama, G., Kenny, T.W. |
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| Zdroj: | 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium; 2006, p300-306, 7p |
| Databáze: | Complementary Index |
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