Carbon-Rich SiOCH Films with Hydrocarbon Network Bonds for Low-k Dielectrics: First-Principles Investigation.
| Autor: | Tajima, N., Ohno, T., Hamada, T., Yoneda, K., Kobayashi, N., Shinriki, M., Miyazawa, K., Sakota, K., Hasaka, S., Inoue, M. |
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| Zdroj: | 2006 International Interconnect Technology Conference; 2006, p122-124, 3p |
| Databáze: | Complementary Index |
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