Yield & Reliability challenges of BEOL Interconnects.
| Autor: | Tan, J.B., Zhang, B.C., Tang, T.J., Perera, C., Lims, Y.K., Siew, Y.K., Ee, Y.C., Lu, W., Liu, H., Seet, C.S., Zhang, B., Lim, S.K., Chua, S.T., Ismail, Z., Seah, B.M., Ee, P.Y., Vigar, D., Hsia, L.C. |
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| Zdroj: | 2006 International Interconnect Technology Conference; 2006, p6-8, 3p |
| Databáze: | Complementary Index |
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