M3-Modular Multi-Scale Assembly System for MEMS Packaging.

Autor: Popa, D., Murthy, R., Mitta, M., Jeongsik Sin, Stephanou, H.
Zdroj: 2006 IEEE/RSJ International Conference on Intelligent Robots & Systems; 2006, p3712-3717, 6p
Databáze: Complementary Index