C-V test structures for metal gate CMOS.
| Autor: | Bankras, R.G., Tiggelman, M.P.J., Adi Negara, M., Sasse, G.T., Schmitz, J. |
|---|---|
| Zdroj: | 2006 IEEE International Conference on Microelectronic Test Structures; 2006, p226-229, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|